Establishment of Compact Chemical Process by Supercritical Fluids
نویسندگان
چکیده
منابع مشابه
Chemical Fluid Deposition of Metals from Supercritical Fluids
Chemical Fluid Deposition (CFD) involves the chemical reduction of organometallic compounds in SCFs to yield high purity deposits.[4] Typically, the reaction is initiated upon the addition of H2 or other reducing agent. The advantages of CFD over conventional deposition techniques are a consequence of the unique properties of SCFs, which lie intermediate to those of liquids and gases. Supercrit...
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ژورنال
عنوان ژورنال: Journal of the Vacuum Society of Japan
سال: 2009
ISSN: 1882-4749,1882-2398
DOI: 10.3131/jvsj2.52.557